IIT JEE , AIEEE Forum - Physics , Magnetism

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Diamond-like carbon (DLC) films were deposited on the inner wall surface of 304 austenitic type stainless steel tubes with inner diameter of 0.9 and 0.5 and 15 mm length by a plasma source ion implantation (PSII). A 2.45 GHz microwave was fed into a tubular vacuum chamber and supplied to an antenna. An acetylene gas was fed into the alumina ceramic tube. Plasma was produced by a coaxial electron cyclotron resonance (ECR) discharge. A magnetic field of one kilogauss was generated by a solenoidal coil. The negative high voltage pulse (typically ?10 kV, 1 kHz, 10 ?s) was applied to the steel tube. The results showed that the DLC film deposition on the inner wall of sub-millimeter size steel tubes was achieved by the PSII. Raman spectra of the DLC films showed a broad peak related to amorphous carbon structure.

Nitrogen and carbon ions were implanted into the inner wall surface of 304 austenitic type stainless steel and Ni tubes with inner diameters of 0.9, 2 and 1.6 mm, by a plasma source ion implantation (PSII). These 30 mm long substrate tubes were fixed to an alumina ceramic tube in a vacuum chamber, fed with nitrogen and acetylene gases. A 2.45 GHz microwave was supplied to an antenna in the alumina ceramic tube and plasma was produced by a coaxial electron cyclotron resonance (ECR) discharge in this tube. A negative high voltage pulse of 15 kV (1 kHz, 10 ?s) was applied to the steel and Ni tubes to extract ions from the generated plasma. The compositional and structural characterizations of the implanted surfaces were carried out using Auger electron spectroscopy and Raman spectroscopy. The results showed that uniform nitrogen ion implantation into the millimeter size inner wall surface of metal tubes was achieved by the PSII. Carbon implantation and subsequent diamond like carbon (DLC) coating was confirmed for the inner wall surface treated by acetylene PSII.

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